Semiconductor Device Design and Fabrication
Advisor: Dr. Sylvain Marsillac
Old Dominion University, 2013-2014
Design and fabrication process of a p-type semiconductor wafer involving cleaning, dry and wet oxidation, impurity doping, photolithography, chemical etching, and metallization processes.
Figured
Semiconductor Wafer with 324 Devices (Resistors, P-N Diodes, MOSFETs, and MOS Capacitors)
Date
2013-2014